Ingot SiC nke dị sentimita 2 nke Dia50.8mmx10mmt 4H-N monocrystal

Foto a na-egosi na SiC ingot nke dị sentimita 2.50.8mmx10mmt 4H-N monocrystal

Nkọwa Dị Mkpirikpi:

Ingot SiC (silicon carbide) nke dị sentimita abụọ na-ezo aka na kristal silicon carbide nke nwere dayameta ma ọ bụ ogologo nsọtụ nke sentimita abụọ. A na-eji ingot silicon carbide eme ihe dị ka ihe mmalite maka mmepụta nke ngwaọrụ semiconductor dị iche iche, dị ka ngwaọrụ eletrọniki ike na ngwaọrụ optoelectronic.

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atụmatụ

Teknụzụ SiC Crystal Growth

Àgwà nke SiC na-eme ka ọ sie ike ịkọ otu kristal. Nke a bụ isi n'ihi na enweghị usoro mmiri mmiri nwere oke stoichiometric nke Si : C = 1 : 1 na nrụgide ikuku, ọ gaghịkwa ekwe omume itolite SiC site na usoro uto ndị toro eto, dịka usoro ise ihe kpọmkwem na usoro crucible na-ada ada, nke bụ isi ihe dị na ụlọ ọrụ semiconductor. N'echiche, enwere ike inweta ngwọta nwere oke stoichiometric nke Si : C = 1 : 1 naanị mgbe nrụgide karịrị 10E5atm na okpomọkụ dị elu karịa 3200 ℃. Ugbu a, usoro ndị bụ isi gụnyere usoro PVT, usoro mmiri mmiri, na usoro nchekwa kemịkalụ dị elu nke vapor.

A na-akọkarị wafers na kristal SiC anyị na-enye site na mbugharị ikuku anụ ahụ (PVT), nke a bụkwa obere okwu mmalite maka PVT:

Usoro njem ikuku nkịtị (PVT) sitere na usoro sublimation gas-phase nke Lely mepụtara na 1955, ebe a na-etinye ntụ ntụ SiC n'ime tube graphite ma kpoo ya ọkụ ruo oke okpomọkụ iji mee ka ntụ ntụ SiC gbazee ma dị nro, wee mee ka tube graphite jụọ oyi, a na-etinyekwa akụkụ gas gbawara agbawa nke ntụ ntụ SiC ma mee ka ọ dị ka kristal SiC n'akụkụ gburugburu nke tube graphite. Ọ bụ ezie na usoro a siri ike inweta kristal SiC buru ibu na usoro ntinye n'ime tube graphite siri ike ijikwa, ọ na-enye echiche maka ndị nchọpụta na-esote.

YM Tairov na ndị otu ya na Rọshịa webatara echiche nke kristal mkpụrụ site na nke a, nke doziri nsogbu nke ọdịdị kristal a na-apụghị ịchịkwa na ọnọdụ nucleation nke kristal SiC. Ndị nchọpụta ndị sochirinụ gara n'ihu na-emeziwanye ma mechaa mepụta usoro nnyefe vapor anụ ahụ (PVT) nke a na-eji eme ihe n'ụlọ ọrụ mmepụta ihe taa.

Dịka ụzọ izizi nke SiC kristal, PVT bụ ụzọ kachasị ewu ewu maka kristal SiC. Ma e jiri ya tụnyere ụzọ ndị ọzọ, usoro a nwere obere ihe achọrọ maka akụrụngwa uto, usoro uto dị mfe, njikwa siri ike, mmepe zuru oke na nyocha, ma emechaa mepụta ya n'ime ụlọ ọrụ mmepụta ihe.