2inch SiC ingot Dia50.8mmx10mmt 4H-N monocrystal
Teknụzụ uto SiC Crystal
Njirimara SiC na-eme ka o sie ike itolite otu kristal.Nke a bụ n'ihi n'eziokwu na ọ dịghị mmiri mmiri mmiri na stoichiometric ratio nke Si: C = 1: 1 na ikuku ikuku, na ọ gaghị ekwe omume na-eto eto SiC site na-eto eto eto eto, dị ka kpọmkwem ịbịaru usoro na. usoro nke na-ada ada, nke bụ isi ihe na ụlọ ọrụ semiconductor.Theoretically, a ngwọta na a stoichiometric ratio nke Si: C = 1: 1 nwere ike nweta naanị mgbe nrụgide dị ukwuu karịa 10E5atm na okpomọkụ dị elu karịa 3200 ℃.Ugbu a, ụzọ ndị bụ isi gụnyere usoro PVT, usoro mmiri mmiri, na usoro ntinye kemịkalụ ikuku na-ekpo ọkụ.
Ndị SiC wafers na kristal anyị na-enye bụ ndị na-eto eto site na njem ụgbọ njem anụ ahụ (PVT), na ihe ndị a bụ mmeghe dị nkenke na PVT:
Ụzọ ụgbọ njem anụ ahụ (PVT) sitere na usoro gas-phase sublimation usoro nke Lely chepụtara na 1955, bụ nke a na-etinye ntụ ntụ SiC n'ime tube graphite ma kpoo ọkụ na okpomọkụ dị elu iji mee ka ntụ ntụ SiC decompose na sublimate, na mgbe ahụ graphite. A na-eme ka tube dị jụụ, a na-edobekwa ihe ndị mejupụtara gas-phase nke ntụ ntụ SiC na kristal dị ka kristal SiC na mpaghara gbara ya gburugburu nke tube graphite.Ọ bụ ezie na usoro a siri ike ịnweta otu kristal SiC buru ibu na usoro ntinye n'ime graphite tube siri ike ịchịkwa, ọ na-enye echiche maka ndị nchọpụta na-esote.
YM Tairov et al.na Russia webatara echiche nke kristal mkpụrụ na ndabere a, bụ nke doziri nsogbu nke ọdịdị kristal na-enweghị nchịkwa na ọnọdụ nucleation nke kristal SiC.Ndị nchọpụta sochirinụ gara n'ihu na-emeziwanye ma mechaa mepụta usoro mbufe ikuku anụ ahụ (PVT) nke a na-eji arụ ọrụ arụ ọrụ taa.
Dị ka ụzọ mbụ SiC kristal ibu ụzọ, PVT ugbu a bụ usoro uto kachasị maka kristal SiC.E jiri ya tụnyere ụzọ ndị ọzọ, usoro a nwere ihe dị ala chọrọ maka akụrụngwa na-eto eto, usoro uto dị mfe, njikwa siri ike, mmepe nke ọma na nyocha, ma emebelarị ya.
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