E nwere ike iji ihe GaN mee ihe dịka 2 inch 4 inch 6 inch Sapphire Substrate (PSS) nke a na-akụ ihe ndị dị na GaN maka ọkụ LED.

E nwere ike iji ihe GaN mee ihe ọkụ LED nke dị sentimita 2, sentimita 4, sentimita 6, nke e ji ihe ndị dị ka sapphire mee. Foto a na-egosi

Nkọwa Dị Mkpirikpi:

Ihe mkpuchi sapphire e ji ụkpụrụ mee (PSS) bụ ihe mkpuchi maka ịkpụcha akọrọ na ihe mkpuchi sapphire, a na-akpụ ihe mkpuchi ahụ na ụkpụrụ dịka usoro lithography ọkọlọtọ si dị, wee jiri teknụzụ ịkpụcha sapphire e ji ICP mee ihe, a na-ewepụkwa ihe mkpuchi ahụ, n'ikpeazụ a na-akụ ihe GaN na ya, ka epitaxy ogologo nke ihe GaN wee ghọọ epitaxy kwụ ọtọ. Usoro a gụnyere ọtụtụ usoro dị ka mkpuchi photoresist, ikpughe nzọụkwụ, imepụta ụkpụrụ ikpughe, ICP dry etching na nhicha.

Zitere anyị ozi-e

atụmatụ

Isi atụmatụ

1. Àgwà owuwu:
Elu PSS nwere usoro cone ma ọ bụ triangle conical nke nwere ike ijikwa ọdịdị, nha na nkesa site na ịgbanwe paramita usoro etching.
Nhazi eserese ndị a na-enyere aka ịgbanwe ụzọ mgbasa nke ìhè ma belata ngosipụta zuru oke nke ìhè, si otú a na-eme ka arụmọrụ nke mwepụta ìhè ka mma.

2. Njirimara ihe:
PSS na-eji sapphire dị elu dị ka ihe e ji eme ihe, nke nwere àgwà siri ike dị elu, ike okpomọkụ dị elu, ezigbo nkwụsi ike kemịkalụ na nghọta anya.
Àgwà ndị a na-enyere PSS aka iguzogide gburugburu siri ike dịka okpomọkụ na nrụgide dị elu ma na-ejigide arụmọrụ anya dị mma.

3. Arụmọrụ anya:
Site na ịgbanwe ọtụtụ mgbasa ozi na njikọ dị n'etiti GaN na sapphire substrate, PSS na-eme ka foton ndị na-egosipụta kpamkpam n'ime oyi akwa GaN nwee ohere ịgbanahụ ihe mkpuchi sapphire.
Njirimara a na-eme ka arụmọrụ mwepụta ọkụ nke LED dịkwuo mma nke ukwuu ma na-eme ka ike ọkụ nke LED dịkwuo mma.

4. Njirimara usoro:
Usoro mmepụta nke PSS dị mgbagwoju anya, gụnyere ọtụtụ usoro dịka lithography na etching, ma chọọ akụrụngwa dị oke mma na njikwa usoro.
Agbanyeghị, site na ọganihu na-aga n'ihu nke teknụzụ na mbelata ọnụ ahịa, a na-eme ka usoro mmepụta nke PSS dịkwuo mma ma melite.

Isi uru

1. Meziwanye arụmọrụ mwepụta ìhè: PSS na-eme ka arụmọrụ mwepụta ìhè nke LED dịkwuo mma nke ukwuu site n'ịgbanwe ụzọ mgbasa ọkụ ma belata ntụgharị zuru oke.

2. Ogologo ndụ LED: PSS nwere ike ibelata njupụta dislocation nke ihe epitaxial GaN, si otú a belata njikọta na-abụghị nke radieshọn na mgbanwe mmiri na mpaghara na-arụ ọrụ, na-agbatị ndụ LED.

3. Meziwanye ìhè LED: N'ihi mmụba nke arụmọrụ mwepụta ìhè na ịgbatị ndụ LED, ike ọkụ LED na PSS na-eme ka ọ dịkwuo mma nke ukwuu.

4. Belata ọnụ ahịa mmepụta: Ọ bụ ezie na usoro mmepụta PSS dị mgbagwoju anya, ọ nwere ike ime ka arụmọrụ na ndụ LED dịkwuo mma nke ukwuu, si otú a belata ọnụ ahịa mmepụta ruo n'ókè ụfọdụ ma melite asọmpi nke ngwaahịa ahụ.

Isi ebe ngwa

1. Ọkụ LED: PSS dị ka ihe e ji eme ihe maka ibe LED, nwere ike ime ka arụmọrụ na-enwu enwu na ndụ LED ka mma nke ukwuu.
N'ihe gbasara ọkụ LED, a na-ejikarị PSS eme ihe n'ọtụtụ ngwaahịa ọkụ dị iche iche, dịka oriọna okporo ámá, oriọna tebụl, ọkụ ụgbọala na ihe ndị ọzọ.

2. Ngwaọrụ Semiconductor: Na mgbakwunye na ọkụ LED, enwere ike iji PSS rụpụta ngwaọrụ semiconductor ndị ọzọ, dịka ihe nchọpụta ọkụ, laser, wdg. Ngwaọrụ ndị a nwere ọtụtụ ojiji na nkwukọrịta, ahụike, agha na ngalaba ndị ọzọ.

3. Njikọta Optoelectronic: Njirimara anya na nkwụsi ike nke PSS na-eme ka ọ bụrụ otu n'ime ihe kachasị mma n'ọhịa nke njikọta optoelectronic. Na njikọta optoelectronic, enwere ike iji PSS mee nduzi optical, swiichi anya na ihe ndị ọzọ iji mezuo nnyefe na nhazi nke akara anya.

Teknụzụ paramita

ihe	Ihe e ji aka dee sapphire (2~6inch)
Dayameta	50.8 ± 0.1 mm	100.0 ± 0.2 mm	150.0 ± 0.3 mm
Ọkpụrụkpụ	430 ± 25μm	650 ± 25μm	1000 ± 25μm
Nhazi Elu	C-plane (0001) dị n'akụkụ na-aga n'akụkụ M-axis (10-10) 0.2 ± 0.1°
	C-plane (0001) gbapụrụ iche na-aga n'akụkụ A (11-20) 0 ± 0.1°
Nhazi Ala Dị Elu nke Mbụ	A-Ụgbọelu (11-20) ± 1.0°
Ogologo Dị larịị nke Mbụ	16.0 ± 1.0 mm	30.0 ± 1.0 mm	47.5 ± 2.0 mm
R-Plane	Elekere itoolu
Mmecha Elu Ihu	E ji ụkpụrụ mee ihe
Mmecha Elu Azụ	SSP: Ala dị mma, Ra = 0.8-1.2um; DSP: Epi-polished, Ra <0.3nm
Akara Laser	Azụ akụkụ
TV	≤8μm	≤10μm	≤20μm
ỤTA	≤10μm	≤15μm	≤25μm
WARP	≤12μm	≤20μm	≤30μm
Mwepu nke Ọnụọgụ	≤2 mm
Nkọwapụta Ụkpụrụ	Ọdịdị Ọdịdị	Dome, Kọn, Pyramid
	Ogologo Ụkpụrụ	1.6~1.8μm
	Dayameta Ụkpụrụ	2.75~2.85μm
	Oghere Ụkpụrụ	0.1~0.3μm

XKH na-elekwasị anya na mmepe, mmepụta na ire nke ihe e ji aka rụọ nke e ji sapphire (PSS) mee, ma na-agba mbọ inye ndị ahịa gburugburu ụwa ngwaahịa PSS dị elu, nke nwere arụmọrụ dị elu. XKH nwere teknụzụ mmepụta dị elu na ndị otu teknụzụ ọkachamara, nke nwere ike ịhazi ngwaahịa PSS na nkọwapụta dị iche iche na usoro ụkpụrụ dị iche iche dịka mkpa ndị ahịa si dị. N'otu oge ahụ, XKH na-elebara ịdị mma ngwaahịa na ịdị mma ọrụ anya, ma na-agba mbọ inye ndị ahịa ụdị nkwado teknụzụ na ngwọta zuru oke. N'ọhịa PSS, XKH enwetala ahụmịhe na uru bara ụba, ma na-atụ anya ịrụkọ ọrụ ọnụ na ndị mmekọ ụwa iji kwalite mmepe ọhụrụ nke ọkụ LED, ngwaọrụ semiconductor na ụlọ ọrụ ndị ọzọ.