2 inch 4 inch 6 inch Patterned Sapphire Substrate (PSS) nke a na-akụ ihe GaN nwere ike iji maka ọkụ ọkụ.

Nkọwa dị mkpirikpi:

Ihe nkpuchi sapphire nke a na-emepụta (PSS) bụ ihe nkpuchi maka etching akọrọ na sapphire mkpụrụ, a na-ede ihe nkpuchi ahụ na ụkpụrụ site na usoro lithography ọkọlọtọ, mgbe ahụ, sapphire na-eji teknụzụ ICP etching na-ewepụ ihe mkpuchi ahụ, n'ikpeazụkwa, ihe GaN na-eto eto na ya, nke mere na ogologo oge epitaxy nke GaN na-aghọ epitaxy. Usoro a gụnyere ọtụtụ usoro dị ka mkpuchi fotoresist, ikpughe nzọụkwụ, ụkpụrụ ikpughe, ICP akọrọ etching na nhicha.

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Nkọwa ngwaahịa

Mkpado ngwaahịa

Isi atụmatụ

1. Njirimara nhazi:
N'elu PSS nwere usoro cone ma ọ bụ triangular conical nke nwere ike ịchịkwa ọdịdị ya, nha ya na nkesa ya site n'ịgbanwe usoro etching.
Ihe owuwu ndị a na-ese onyinyo na-enyere aka ịgbanwe ụzọ mgbasa nke ìhè ma belata mkpokọta ọkụ, si otú a na-emeziwanye arụmọrụ nke mmịpụta ọkụ.

2. Njirimara ihe:
PSS na-eji sapphire dị elu dị ka ihe eji eme ihe, nke nwere njirimara nke ịdị elu siri ike, ịdị elu nke okpomọkụ, ezigbo nkwụsi ike nke kemịkal na nghọta anya.
Àgwà ndị a na-enyere PSS aka iguzogide gburugburu ebe ọjọọ dị ka okpomọkụ dị elu na nrụgide ka ọ na-ejigide arụmọrụ anya mara mma.

3. Ọrụ anya:
Site n'ịgbanwe ọtụtụ mgbasa ozi na interface dị n'etiti GaN na sapphire substrate, PSS na-eme ka foton ndị na-egosipụta kpamkpam n'ime akwa GaN nwere ohere ịgbanarị mkpụrụ sapphire.
Njirimara a na-eme ka ọkụ mmịpụta ọkụ dịkwuo mma ma na-eme ka ọkụ ọkụ dị ọkụ.

4. Njirimara usoro:
Usoro mmepụta nke PSS dị mgbagwoju anya, gụnyere ọtụtụ usoro dị ka lithography na etching, ma na-achọ ngwá ọrụ dị elu na njikwa usoro.
Otú ọ dị, site na ọganihu nkà na ụzụ na-aga n'ihu na mbelata ụgwọ, a na-eji nwayọọ nwayọọ na-emeziwanye usoro mmepụta nke PSS ma melite.

Uru isi

1.Improve ìhè mmịpụta arụmọrụ: PSS budata mma ìhè mmịpụta arụmọrụ nke LED site na-agbanwe ìhè propagation ụzọ na ibelata mkpokọta echiche.

2.Prolong LED ndụ: PSS nwere ike ibelata dislocation njupụta nke GaN epitaxial ihe, si otú mbenata ndị na-abụghị radiative recombination na tụgharịa leakage ugbu a na mpaghara na-arụ ọrụ, ịgbatị ndụ nke LED.

3.Improve LED nchapụta: N'ihi na mma nke ìhè mmịpụta arụmọrụ na ndọtị nke ikanam ndụ, na LED luminous ike na PSS na budata enwekwukwa.

4.Reduce mmepụta ụgwọ: Ọ bụ ezie na n'ichepụta usoro nke PSS bụ dịtụ mgbagwoju, ọ nwere ike budata melite luminous arụmọrụ na ndụ nke ikanam, si otú mbenata mmepụta-akwụ ụgwọ ruo n'ókè ụfọdụ na-emeziwanye asọmpi nke ngwaahịa.

Mpaghara ngwa ngwa

1. Ikanam ọkụ: PSS dị ka a mkpụrụ ihe maka ikanam ibe, nwere ike budata melite luminous arụmọrụ na ndụ nke ikanam.
N'ihe gbasara ọkụ ọkụ LED, a na-ejikarị PSS eme ihe na ngwaahịa ọkụ dị iche iche, dị ka oriọna okporo ụzọ, oriọna tebụl, ọkụ ụgbọ ala na ihe ndị ọzọ.

2.Semiconductor ngwaọrụ: Na mgbakwunye na ọkụ ọkụ LED, PSS nwekwara ike iji mepụta ngwaọrụ semiconductor ndị ọzọ, dị ka ihe nchọpụta ọkụ, lasers, wdg. Ngwa ndị a nwere ọtụtụ ngwa ngwa na nkwurịta okwu, ahụike, agha na mpaghara ndị ọzọ.

3.Optoelectronic integration: Ngwongwo anya na nkwụsi ike nke PSS na-eme ka ọ bụrụ otu n'ime ihe ndị dị mma n'ọhịa nke optoelectronic integration.Na optoelectronic integration, PSS nwere ike iji mee ka anya waveguides, ngwa anya switches na ihe ndị ọzọ iji ghọta nnyefe na nhazi nke ngwa anya mgbaàmà.

Usoro nka

Ihe	Mpempe akwụkwọ sapphire a haziri ahazi (2 ~ 6 inch)
Dayameta	50.8 ± 0.1 mm	100.0 ± 0.2 mm	150.0 ± 0.3 mm
Ọkpụrụkpụ	430 ± 25μm	650 ± 25μm	1000 ± 25μm
Ntuzi ihu ihu	C-ụgbọ elu (0001) pụọ-n'akuku chere M-axis (10-10) 0.2 ± 0.1°
	C-ụgbọ elu (0001) pụọ n'akuku A-axis (11-20) 0 ± 0.1°
Nhazi Flat nke izizi	A-ụgbọ elu (11-20) ± 1.0°
Ogologo Flat nke izizi	16.0 ± 1.0 mm	30.0 ± 1.0 mm	47.5 ± 2.0 mm
Ụgbọ elu R	Elekere 9
N'ihu elu imecha	Nhazi
Emecha elu elu azụ	SSP: Ọma-ala, Ra=0.8-1.2um; DSP: Epi-egbu maramara, Ra <0.3nm
Laser Mark	Akụkụ azụ
TTV	≤8μm	≤10μm	≤20μm
ỤTA	≤10μm	≤15μm	≤25μm
WARP	≤12μm	≤20μm	≤30μm
Mwepu ihu	≤2 mm
Nkọwapụta ụkpụrụ	Ọdịdị Ọdịdị	Dome, cone, pyramid
	Ọdịdị Elu	1.6 ~ 1.8 μm
	Dayameta ụkpụrụ	2.75 ~ 2.85μm
	Oghere ụkpụrụ	0.1-0.3 μm

XKH na-elekwasị anya na mmepe, mmepụta na ire ahịa nke sapphire substrate (PSS), ma na-agba mbọ ịnye ndị ahịa ahịa gburugburu ụwa dị elu na ngwaahịa PSS dị elu. XKH nwere teknụzụ nrụpụta dị elu na ndị otu ọkachamara ọkachamara, nke nwere ike hazie ngwaahịa PSS nwere nkọwa dị iche iche na usoro ụkpụrụ dị iche iche dabere na mkpa ndị ahịa. N'otu oge ahụ, XKH na-aṅa ntị na àgwà ngwaahịa na àgwà ọrụ, ma na-agba mbọ inye ndị ahịa nkwado teknụzụ na ngwọta zuru oke. N'ọhịa nke PSS, XKH achịkọtala ahụmahụ na uru bara ụba, ma na-atụ anya ka ya na ndị mmekọ ụwa na-arụkọ ọrụ ọnụ iji kwalite mmepe ọhụrụ nke ọkụ ọkụ LED, ngwaọrụ semiconductor na ụlọ ọrụ ndị ọzọ.